Wisc.edu | Learn@UW | Donate

Claude Woods

Awards | Publications

Professor, Born 1940

B.S. 1961, Georgia Institute of Technology

A.M. 1962, Harvard University

Ph.D. 1965, Harvard University

Room: 4337
Phone: 608-262-2892
Email: woods@chem.wisc.edu
Position: Professor

Selected Publications

  • K. H. R. Kirmse, A. E. Wendt, S. B. Disch, J.-Z. Wu, I. C. Abraham, J. A. Meyer, R. A. Breun, and R. C. Woods, "SiO 2 to Si Selectivity Mechanisms in High Density Fluorocarbon Plasma Etching", J. Vac. Sci. Technol. B 14 , 710 (1996).

  • Y. Pak, R. C. Woods, and K. A. Peterson, "A Coupled Cluster Study of the Spectroscopic Properties and Electric Dipole Moment Functions of Nitrous Sulfide", J. Chem. Phys. 104 , 7073 (1996).

  • Y. Pak and R. C. Woods, "Coupled Cluster Calculations of the Potential Energy Surfaces and spectroscopic Constants of SiF 2 , PFs(+,2), SO2, POs(-,2), and ClOs(+,2)", J. Chem. Phys. 104 , 5547 (1996).

  • R. C. Woods, "Infrared Diode Laser Absorption Spectroscopy as a Plasma Chemical Diagnostic" in Handbook of Thin Film Process Technology , D. A. Glocker and S. I. Shah, eds. (1996)

  • C. Lai, B. Brunmeier, and R. C. Woods, "Magnetically Confined Inductively Coupled Plasma Etching Reactor", J. Vac. Sci. Technol. A 13, 2086 (1995).

  • K.-H. Chew, J. Chen, L. Shohet, and R. C. Woods, "Silicon Oxide Deposition in an Electron Cyclotron Resonance Reactor with a Microwave Spectroscopy Diagnostic", J. Vac. Sci. Technol. A 13 , 2483 (1995).

  • Y. Pak, R. C. Woods, and K. A. Peterson, "A Coupled Cluster Study of the Structure, Spectroscopic Properties, and Isomerization Path of NCS - and CNS - ", J. Chem. Phys. 103 , 9304 (1995).

  • I. D. Sudit and R. C. Woods, "A Study of the Accuracy of Various Langmuir Probe Theories", J. Appl. Phys. 76 , 4488 (1994)

  • R. C. Woods and I. D. Sudit, "Theory of Electron Retardation by Langmuir Probes in Anisotropic Plasmas", Phys. Rev. E. 50 , 2222 (1994).

  • C. Lai, R. A. Breun, P. W. Sandstrom, A. E. Wendt, and N. Hershkowitz, "Langmuir Probe Measurements of Electron Temperature and Density Scaling in Multidipole Radio Frequency Plasmas", J. Vac. Sci. Technol. A. 11 , 1199 (1993).

  • I. D. Sudit and R. C. Woods, "A Workstation Based Langmuir Probe System for Low Pressure DC Plasmas", Rev. Sci. Instrum. 64 , 2440 (1993).

Research Description


Microwave spectroscopy is a technique in which the absorption of radiation in rotational transitions of small molecular species is detected and the resonant frequencies are measured to great accuracy (8 to 9 significant digits). Using quantum mechanics the frequency data can be fit to a model Hamiltonian, and the molecular structure and other molecular properties can be determined with great precision. Intensities and widths of microwave lines provide concentrations and dynamical information. We have applied this technique in laboratory discharge plasmas to transient species like the CN radical the HNC unstable molecule, the a3P metastable electronic state of CO, and especially to molecular ions like CO+, HCO+, HOC+, HNN+, HCS+, KrD+, XeH+, SO+, H2D+, SiF+, or PO+. Many of these species are of great importance in the chemistry of the interstellar medium and have been detected by radioastronomy (actually microwave astronomy), in some cases with our active participation. A great deal of information on the chemistry and dynamics of the interstellar medium has been obtained by radioastronomical study of species like these. The chemistry and dynamics of the laboratory discharges themselves is also of great interest and only partially understood. We are trying to improve this understanding using microwave spectroscopy and other techniques at our disposal. The latter include a quadrupole mass spectrometry, a high resolution ultraviolet-visible emission spectroscopy, and computer controlled Langmuir probes. We are also carrying out large scale quantum chemical calculations of the structures and other properties of small ions and molecules. Many species have been treated with large basis sets (80"100 contracted orbitals) and correlated ab initio methods like CI-SD, MP4-SDQ, CEPA"1, and CASSCF. Results are used to facilitate spectroscopic searches for new ions and also to compare against our experimentally determined spectroscopic constants. Another part of our research involves active participation in the Engineering Research Center for Plasma Aided Manufacturing. Plasma etching and deposition are crucial steps in the manufacture of almost all semiconductor devices, and we are working to understand the details of the chemistry and physics of the plasmas used. Diagnostics like ultra-high resolution infrared diode laser spectroscopy and laster induced fluorescence spectroscopy, laser induced fluorescence spectroscopy, and microwave spectroscopy are being used to probe plasmas in RF (13 MHz) discharge and microwave (2450 MHz) electron cyclotron resonance (ECR) plasma reactors.


Last Updated: October 9, 2003.

 

Awards

  • Visiting Professor, Justus-Liebig University, Giessen, West Germany, May-July 1995

  • Fellowship in American Physical Society, 1991
  • Visiting Professor, University of Bologna, Bologna, Italy, July-August, 1990
  • Corecipient with Christopher S. Gudeman of the Nobel Laureate Signature Award for Graduate Education in Chemistry of the American Chemical Society, 1984

  • NIH predoctoral fellowship, 1964-65

  • NSF predoctoral fellowship, 1961-64