Transfer of n-type GaSb onto GaAs substrate by hydrogen implantation and wafer bonding

TitleTransfer of n-type GaSb onto GaAs substrate by hydrogen implantation and wafer bonding
Publication TypeJournal Article
Year of Publication2000
AuthorsZheng, Y, Moran, PD, Guan, ZF, Lau, SS, Hansen, DM, Kuech, TF, Haynes, TE, Hoechbauer, T, Nastasi, M
JournalJournal of Electronic Materials
Volume29
Pagination916-920
Date PublishedJul
DOI10.1007/s11664-000-0181-6