Solid-Phase Epitaxy of Perovskite High Dielectric PrAlO3 Films Grown by Atomic Layer Deposition for Use in Two-Dimensional Electronics and Memory Devices

TitleSolid-Phase Epitaxy of Perovskite High Dielectric PrAlO3 Films Grown by Atomic Layer Deposition for Use in Two-Dimensional Electronics and Memory Devices
Publication TypeJournal Article
Year of Publication2019
AuthorsWaduge, WLI, Chen, YJ, Zuo, P, Jayakodiarachchi, N, Kuech, TF, Babcock, SE, Evans, PG, Winter, CH
JournalAcs Applied Nano Materials
Volume2
Pagination7449-7458
Date PublishedNov
ISBN Number2574-0970
DOI10.1021/acsanm.9b02153