SILICON DOPING OF GAAS AND ALXGA1-XAS USING DISILANE IN METALORGANIC CHEMICAL VAPOR-DEPOSITION

TitleSILICON DOPING OF GAAS AND ALXGA1-XAS USING DISILANE IN METALORGANIC CHEMICAL VAPOR-DEPOSITION
Publication TypeJournal Article
Year of Publication1984
AuthorsKuech, TF, Veuhoff, E, Meyerson, BS
JournalJournal of Crystal Growth
Volume68
Pagination48-53
ISBN Number0022-0248
DOI10.1016/0022-0248(84)90396-8