REACTION OF TRIMETHYLGALLIUM IN THE ATOMIC LAYER EPITAXY OF GAAS(100)

TitleREACTION OF TRIMETHYLGALLIUM IN THE ATOMIC LAYER EPITAXY OF GAAS(100)
Publication TypeJournal Article
Year of Publication1989
AuthorsYu, ML, Memmert, U, Kuech, TF
JournalApplied Physics Letters
Volume55
Pagination1011-1013
Date PublishedSep
ISBN Number0003-6951
DOI10.1063/1.101719