A near-field scanning optical microscopy study of the uniformity of GaAs surface passivation

TitleA near-field scanning optical microscopy study of the uniformity of GaAs surface passivation
Publication TypeJournal Article
Year of Publication1996
AuthorsLiu, JT, Kuech, TF
JournalApplied Physics Letters
Volume69
Pagination662-664
Date PublishedJul
DOI10.1063/1.117798