Mechanistic study of borosilicate glass growth by low-pressure chemical vapor deposition from tetraethylorthosilicate and trimethylborate

TitleMechanistic study of borosilicate glass growth by low-pressure chemical vapor deposition from tetraethylorthosilicate and trimethylborate
Publication TypeJournal Article
Year of Publication2000
AuthorsHansen, DM, Charters, D, Au, YL, Mak, WK, Tejasukmana, W, Moran, PD, Kuech, TF
JournalJournal of Electronic Materials
Volume29
Pagination1312-1318
Date PublishedNov
DOI10.1007/s11664-000-0131-3