Investigation of dislocations and defects in epitaxial lateral overgrown GaN by photoelectrochemical wet etching

TitleInvestigation of dislocations and defects in epitaxial lateral overgrown GaN by photoelectrochemical wet etching
Publication TypeJournal Article
Year of Publication2003
AuthorsWang, F, Zhang, R, Xiu, XQ, Chen, KL, Gu, SL, Shen, B, Zheng, YD, Kuech, TF
JournalMaterials Letters
Volume57
Pagination1365-1368
Date PublishedFeb
DOI10.1016/s0167-577x(02)00988-6