Interfacial properties of AlN/Si (111) grown by metal-organic chemical vapour deposition

TitleInterfacial properties of AlN/Si (111) grown by metal-organic chemical vapour deposition
Publication TypeJournal Article
Year of Publication2002
AuthorsXi, DJ, Zheng, YD, Chen, P, Zhao, ZM, Xie, SY, Jiang, RL, Shen, B, Gu, SL, Zhang, R
JournalChinese Physics Letters
Volume19
Pagination543-545
Date PublishedApr
Accession Number552AZ-0029