Impurity incorporation and the surface morphology of MOVPE grown GaAs

TitleImpurity incorporation and the surface morphology of MOVPE grown GaAs
Publication TypeJournal Article
Year of Publication1999
AuthorsLi, J, Kuech, TF
JournalJournal of Electronic Materials
Volume28
Pagination124-133
Date PublishedFeb
DOI10.1007/s11664-999-0230-8