IMPROVED DETECTION OF CARBON IN GAAS BY SECONDARY ION MASS-SPECTROSCOPY - THE INFLUENCE OF HYDROCARBONS IN METALORGANIC VAPOR-PHASE EPITAXY

TitleIMPROVED DETECTION OF CARBON IN GAAS BY SECONDARY ION MASS-SPECTROSCOPY - THE INFLUENCE OF HYDROCARBONS IN METALORGANIC VAPOR-PHASE EPITAXY
Publication TypeJournal Article
Year of Publication1988
AuthorsScilla, GJ, Kuech, TF, Cardone, F
JournalApplied Physics Letters
Volume52
Pagination1704-1706
Date PublishedMay
ISBN Number0003-6951
DOI10.1063/1.99023