Gas-Phase and Surface-Reactions in Si Doping of Gaas by Silanes

TitleGas-Phase and Surface-Reactions in Si Doping of Gaas by Silanes
Publication TypeJournal Article
Year of Publication1988
AuthorsMoffat, HK, Kuech, TF, Jensen, KF, Wang, PJ
JournalJournal of Crystal Growth
Volume93
Pagination594-601
Date PublishedNov-Dec
ISBN Number0022-0248