FUTURE BEAM-CONTROLLED PROCESSING TECHNOLOGIES FOR MICROELECTRONICS

TitleFUTURE BEAM-CONTROLLED PROCESSING TECHNOLOGIES FOR MICROELECTRONICS
Publication TypeJournal Article
Year of Publication1988
AuthorsKern, DP, Kuech, TF, Oprysko, MM, Wagner, A, Eastman, DE
JournalScience
Volume241
Pagination936-944
Date PublishedAug
ISBN Number0036-8075
DOI10.1126/science.241.4868.936