EPITAXIAL-GROWTH OF GAAS WITH (C2H5)2GACL AND ASH3 IN A HOTWALL REACTOR

TitleEPITAXIAL-GROWTH OF GAAS WITH (C2H5)2GACL AND ASH3 IN A HOTWALL REACTOR
Publication TypeJournal Article
Year of Publication1991
AuthorsBuchan, NI, Kuech, TF, Tischler, MA, Scilla, G, Cardone, F, Potemski, R
JournalJournal of the Electrochemical Society
Volume138
Pagination2789-2794
Date PublishedSep
ISBN Number0013-4651
DOI10.1149/1.2086057