CHARACTERIZATION OF SILICON IMPLANTED GAAS BUFFER LAYERS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

TitleCHARACTERIZATION OF SILICON IMPLANTED GAAS BUFFER LAYERS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
Publication TypeJournal Article
Year of Publication1985
AuthorsKuech, TF, Potemski, R, Chappell, TI
JournalJournal of Applied Physics
Volume58
Pagination1196-1203
ISBN Number0021-8979
DOI10.1063/1.336137